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    A Characterization of the Performance of a MEMS Gyroscope in Acoustically Harsh Environments

    机译:声学恶劣环境下MEMS陀螺仪的性能表征

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    Microelectromechanical systems (MEMS) gyroscopes are typically smaller and less expensive than their macroscale counterparts. For this reason, they are being used in many new applications, including in harsh environments. It has been well documented that the performance of unprotected MEMS gyroscopes can be deleteriously affected by exposure to mechanical shock or high-frequency vibrations. The results of this investigation experimentally demonstrate that MEMS gyroscopes are also susceptible to high-power high-frequency acoustic noise when acoustic energy frequency components are close to the resonating frequency of the gyroscope's proof mass. Additionally, due to microfabrication tolerances and the resulting differences between otherwise identical devices, there can be significant differences in the acoustically sensitive bandwidth between otherwise identical MEMS gyroscopes. This phenomenon is characterized for the ADXRS300 MEMS gyroscope.
    机译:微机电系统(MEMS)陀螺仪通常比大型陀螺仪更小,更便宜。因此,它们被用于许多新应用中,包括在恶劣的环境中。有充分的文献记载,不受?;さ腗EMS陀螺仪的性能会受到机械冲击或高频振动的不利影响。该研究的结果实验证明,当声能频率分量接近陀螺仪检定质量的谐振频率时,MEMS陀螺仪也容易受到大功率高频声噪声的影响。另外,由于微加工公差以及在其他方面相同的设备之间产生的差异,因此在其他方面相同的MEMS陀螺仪之间的声敏带宽可能存在显着差异。这种现象是ADXRS300 MEMS陀螺仪的特征。

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